Ellipsometer 1

  • Fixed angle spectroscopic ellipsometer
  • Wavelength range: 190-850 nm
  • Built- in light source and associated device control
  • Wavelength resolution: better than 2 nm
  • Advanced modelling capabilities

Tool Specs

Tool Status Up
Manufacturer Horiba
Model MM-16
Typical Application Film Thickness
Location 6060.2
Related Documents

Standard Operating Procedure

Training Contact Grace Li - li@4dlabs.ca