Ellipsometer 2

  • Variable angle spectroscopic ellipsometer
  • Wavelength range: 260-2100 nm
  • Wavelength resolution: better than 2 nm
  • Advanced modelling capabilities

Tool Specs

Tool Status

Down
Manufacturer Horiba
Model UVISEL
Typical Application Mapping of film thicknesses
Location 6140
Related Documents Standard Operating Procedure
Training Contact Grace Li - li@4dlabs.ca