Probe station - clean room

  • Precision I-V and C-V measurements for a variety of devices
  • Substrates from 150mm wafers to single dies to nanodevices

Tool Specs

Tool Status Up
Manufacturer Cascade Microtech
Model M150
Typical Application Electrical Characterization
Location 6060.17
Related Documents

Standard Operating Procedure

Training Contact Hadi Esmaeilsabzali - hesmaeil@sfu.ca