PVD 3

  • Thermal: Cr
  • E-beam: Ti, Au, Pt, Pd
  • Sources: 1 thermal, 4 e-beam
  • 5E-7 Torr base pressure
  • Processing for 50mm, 100mm and 150mm wafers

Tool Specs

Tool Status Up
Manufacturer Kurt J Lesker
Model PVD75
Typical Application Metal deposition
Location 6060.8
Related Documents

Standard Operating Procedure

Training Contact Chris Balicki - balicki@4dlabs.ca