Spin coaters

  • Programmable spin speeds, temperatures, and ramp rates
  • Edge bead removal available
  • Aluminum hot plate surface for uniform heating
  • Dedicated spin coaters and hot plates for PMMA and MiR 703
  • Spin speeds up to 6000 rpm
  • Processing for small pieces, 50 and 100 mm wafers

Tool Specs

Typical Application Thermal processing
Location 6060.7
Related Documents

Standard Operating Procedure - Brewer Coater

Standard Operating Procedure - Laurell Coater

Training Contact Grace Li - li@4dlabs.ca