Stress meter

  • Analysis of curvature of substrates
  • Calculation of film stresses from deposition
  • Up to 200 mm wafers

Tool Specs

Tool Status Up
Manufacturer Frontier Semiconductor
Model FSM 8000
Typical Application Film stress analysis
Location 6060.2
Related Documents

Standard Operating Procedure

Training Contact Hadi Esmaeilsabzali - hesmaeil@sfu.ca